1.

Conference Proceedings
Conference Proceedings
1. Improved Al-Via Fill Process Technology for Sub-0.25 ｦﾌm Interconnect
Sengupta, S. S. ; Narasimhan, M. ; Lee, S. ; Abburi, M. ; Yao, G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.437-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. Boron Induced Changes in the Structural Properties of Amorphous Silicon Boron Alloys
Yang, G-R. ; Abburi, M. ; Tong, B. Y.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.369-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403