Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas. pp.89-100, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California. pp.198-209, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California. pp.422-434, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering