1.

Conference Proceedings

Conference Proceedings
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
2.

Conference Proceedings

Conference Proceedings
S. Verhaegen ; S. Cosemans ; M. Dusa ; P. Marchal ; A. Nackaerts
Pub. info.: Design for manufacturability through design-process integration II.  pp.69250R-1-69250R-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6925