1.
Conference Proceedings
R. Jonckheere ; G. F. Lorusso ; A. M. Goethals ; J. Hermans ; B. Baudemprez ; A. Myers ; I. Kim ; A. Niroomand ; F. Iwamoto ; N. Stepanenko ; K. Ronse
Pub. info.:
Photomask and next-generation lithography mask technology XIV . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6607
2.
Conference Proceedings
E. Hendrickx ; A. M. Goethals ; A. Niroomand ; R. Jonckheere ; F. Van Roey
Pub. info.:
Lithography Asia 2008 . 1 pp.714007-1-714007-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
3.
Conference Proceedings
A. M. Goethals ; R. Jonckheere ; G. F. Lorusso ; J. Hermans ; F. V. Roey ; A. Myers ; M. Chandhok ; I. Kim ; A. Niroomand ; F. Iwamoto ; N. Stepanenko ; R. Gronheid ; B. Baudemprez ; K. Ronse
Pub. info.:
Emerging lithographic technologies XI . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6517
4.
Conference Proceedings
R. Jonckheere ; F. Iwamoto ; G. F. Lorusso ; A. M. Goethals ; K. Ronse
Pub. info.:
Photomask technology 2007 . 1 pp.673012-1-673012-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730
5.
Conference Proceedings
G. F. Lorusso ; J. Hermans ; A. M. Goethals ; B. Baudemprez ; F. Van Roey
Pub. info.:
Emerging lithographic technologies XII . 1 pp.69210O-1-69210O-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6921