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10 results

Conference Proceedings

1. STRESS GRADIENT AND RELAXATION MEASUREMENTS IN Al AND OXYGEN-IMPLANTED Al FILMS

Besser, Paul R. ; Bader, Stefan ; Venkatraman, Ramnath ; Bravman, John C.

Pub. info.:	Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.255-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	309

Conference Proceedings

2. X-RAY DETERMINATION AND FINITE-ELEMENT MODELING OF STRESS IN PASSIVATED Al-0.5%Cu LINES DURING THERMAL CYCLING

Besser, Paul R. ; Mack, Anne Sauter ; Fraser, David ; Bravman, John C.

Pub. info.:	Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.287-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	309

Conference Proceedings

3. NON-DESTRUCTIVE EVALUATION OF STRAINS AND VOIDING IN PASSIVATED COPPER METALLIZATIONS

Vinci, Richard P. ; Marieb, Thomas N. ; Bravman, John C.

Pub. info.:	Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.229-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	309

Conference Proceedings

4. STRAIN RELAXATION AND IN-SITU OBSERVATION OF VOIDING IN PASSIVATED ALUMINUM ALLOY LINES

Besser, Paul R. ; Marieb, Thomas N. ; Bravman, John C.

Pub. info.:	Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.181-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	309

Conference Proceedings

5. STRESS IN COPPER THIN FILMS WITH BARRIER LAYERS

Vinci, Richard P. ; Bravman, John C.

Pub. info.:	Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.269-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	309

Conference Proceedings

6. STRAIN RELAXATION AND IN-SITU OBSERVATION OF VOIDING IN PASSIVATED ALUMINUM ALLOY LINES

Besser, Paul R. ; Marieb, Thomas N. ; Bravman, John C.

Pub. info.:	Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.249-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	308

Conference Proceedings

7. X-RAY OBSERVATION OF STRESS GRADIENTS AND PRECIPITATION IN PASSIVATED A1-0.5%Cu FILMS

Besser, Paul R. ; Brennan, Sean ; Bravman, John C.

Pub. info.:	Applications of synchrotron radiation techniques to materials science : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.161-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	307

Conference Proceedings

8. STRESS GRADIENT AND RELAXATION MEASUREMENTS IN Al AND OXYGEN-IMPLANTED Al FILLMS

Besser, Paul R. ; Bader, Stefan ; Venkatraman, Ramnath ; Bravman, John C.

Pub. info.:	Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.323-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	308

Conference Proceedings

9. NON-DESTRUCTIVE EVALUATION OF STRAINS AND VOIDING IN PASSIVATED COPPER METALLIZATIONS

Vinci, Richard P. ; Marieb, Thomas N. ; Bravman, John C.

Pub. info.:	Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.297-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	308

10.

Conference Proceedings

10. STRESS IN COPPER THIN FILMS WITH BARRIER LAYERS

Vinci, Richard P. ; Bravman, John C.

Pub. info.:	Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.337-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	308

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