1.
Conference Proceedings
Chen,Y.G. ; Huang,D.L. ; Sung,K.T. ; Chiang,J.J. ; Yu,M. ; Teng,F. ; Chu,L. ; Rey,J.C. ; Bernard,D.A. ; Li,J. ; Moroz,V. ; Boksha,V.V.
Pub. info.:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California . pp.874-884, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
2.
Conference Proceedings
Rey,J.C. ; Li,J. ; Boksha,V.V. ; Bernard,D.A.
Pub. info.:
Microlithographic Techniques in IC Fabrication . pp.68-81, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3183
3.
Conference Proceedings
Brainerd,S.K. ; Bernard,D.A. ; Rey,J.C. ; Li,J. ; Granik,Y. ; Boksha,V.V.
Pub. info.:
Optical Microlithography X . pp.552-566, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
4.
Conference Proceedings
Li,J. ; Bernard,D.A. ; Rey,J.C. ; Boksha,V.V.
Pub. info.:
Optical Microlithography X . pp.643-651, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
5.
Conference Proceedings
Bernard,D.A. ; Li,J. ; Rey,J.C. ; Rouz,K. ; Axelrad,V.
Pub. info.:
Optical Microlithography IX . Part1 pp.273-287, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726