1.

Conference Proceedings
Conference Proceedings
1. Study on lidar received backscattering signals using Monte Carlo method
Yang, H. ; Yang, K. ; Ma, Y. ; Lin, J.
Pub. info.: Ocean remote sensing and applications : 24-26 October 2002, Hangzhou, China.  pp.513-520,  2003.  Bellingham, Wash.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4892
2.

Conference Proceedings
Conference Proceedings
2. High NA polarized light lithography for O.29kl process [6154-15]
Park, C. ; Lee, J. ; Yang, K. ; Tseng, S. ; Min, Y.-H ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Optical Microlithography XIX.  pp.61540F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings
Conference Proceedings
3. OPC accuracy and process window verification methodology for sub-100-nm node
Yang, H. ; Park, C. ; Hong, J. ; Jeong, G. ; Cho, B. ; Choi, J. ; Kang, C. ; Yang, K. ; Kang, E. ; Ji, S. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.437-443,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375