Neue Technologien zur metallisierung von halbleiterbauelementen

Neue Technologien zur metallisierung von halbleiterbauelementen

Author(s):

Chadda, Madan M. ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )
Scheffelmann, Franz ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )
Stoeger, Wolfgang ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )

Publication title:

NASA Technical Reports

Pub. Year:

1993

Issue:

BMFT-FB-T 83-035

Paper no.:

N83-32935

Page(from):

1

Page(to):

59

Pages:

59

Pub. info.:

National Aeronautics and Space Administration

Language:

German

Type:

Technical Paper

Details

TDL ID:	ZA00002949
Note for article:	New technologies for metallization of semiconductor devices

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