1.

Conference Proceedings
Conference Proceedings
1. In Situ Monitoring of HF Reprocessing in an Industrial Scale Recirculator Bath
Reddy, A. J. ; Norga, G. J. ; Park, A. S. ; Smith, A. L. ; Michel, J. ; Kimerling, L. C. ; Parekh, B. ; Shyu, J-H. ; Deane, E.
Pub. info.: Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A..  pp.3-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 447
2.

Conference Proceedings
Conference Proceedings
2. Sol-Gel Growth of High-Quality Pb(Zr,Ti)O3 Films on RuO2 Using Seed Layers
Norga, G. J. ; Fe, L. ; Wouters, D. J. ; Bartic, A. ; Maes, H. E.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.307-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
3.

Conference Proceedings
Conference Proceedings
3. Ultra-Thin PZT Films for Low-Voltage Ferroelectric Non-Volatile Memories
Wouters, D. J. ; Norga, G. J. ; Maes. H. E.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.381-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541