1.

Conference Proceedings
Conference Proceedings
1. EFFECTS OF PRE-GATE OXIDATION CLEANING AND GETTERING UPON THE VERY THIN OXIDE INTEGRITY
Lee, J. ; Tung, C.Y. ; Hahn, S. ; Chiao, P.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.499-504,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Conference Proceedings
Conference Proceedings
2. FORMATION OF A LOW THERMAL DONORS CONCENTRATION LAYEER IN Cz Si WAFER DURING 450 C/64hr ANNEALING
Hahn, S.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.181-186,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59
3.

Conference Proceedings
Conference Proceedings
3. EFFECTS OF THERMAL DONOR GENERATION AND ANNIHILATION UPON OXYGEN PRECIPITATION
Hahn, S. ; Shates S. ; Stein, H.J.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.287-292,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59
4.

Conference Proceedings
Conference Proceedings
4. OXYGEN PRECIPITATION STUDIES FOR N-TYPE AND EPITAXIAL SILICON SUB-STRATES DURING SIMULATED CMOS CYCLES BY SYNCHROTRON SECTION TOPOGRAPHY
Tuomi, T. ; Hahn, S. ; Tilli, M. ; Wong, C.-C.D. ; Borland, O.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.47-52,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
5.

Conference Proceedings
Conference Proceedings
5. INTRINSIC GETTERING OF IRON IN SILICON: A QUANTITATIVE STUDY
Colas, E.G. ; Weber, E.R. ; Hahn, S.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.13-20,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
6.

Conference Proceedings
Conference Proceedings
6. EFFECTIVNESS OF CVD THIN FILM BACKSIDE GETTERING AND ITS INTERACTION WITH INTRINSIC GETTERING
Wong, C.-C ; Hahn, S. ; Ponce, F.A. ; Rek, Z.U.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.33-38,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
7.

Conference Proceedings
Conference Proceedings
7. INTERACTION BETWEEN DEPOSITED FILM EXTRINSIC GETTING AND INTRINSIC GETTING IN CZ SILICON DURING SIMULATED CMOS PROCESS CYCLES
Hahn, S. ; Wong, C.C. -D. ; Ponce, F.A. ; Rek, Z.U.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.353-358,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59
8.

Conference Proceedings
Conference Proceedings
8. QUANTITATIVE STUDY OF METAL GETTERING IN SILICON
Colas, E.G. ; Weber, E. R. ; Hahn, S.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.341-346,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59