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Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.77-82, 1992. Pittsburgh, Pa.. Materials Research Society
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.239-246, 1997. Pennington, NJ. Electrochemical Society
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.207-212, 1997. Pennington, NJ. Electrochemical Society