1.

Conference Proceedings

Conference Proceedings
Hoff,A.M. ; DeBusk,D.K.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.351-364,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
2.

Conference Proceedings

Conference Proceedings
Hoff,A.M. ; DeBusk,D.K. ; Schanzer,R.W.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.207-215,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884