Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device [6111-23]
- Author(s):
- Reu, P. L. ( Sandia National Labs. (USA) )
- Tanner, D. M. ( Sandia National Labs. (USA) )
- Epp, D. S. ( Sandia National Labs. (USA) )
- Parson, T. B. ( Sandia National Labs. (USA) )
- Boyce, B. L. ( Sandia National Labs. (USA) )
- Publication title:
- Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6111
- Pub. Year:
- 2006
- Page(from):
- 61110J
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461537 [0819461539]
- Language:
- English
- Call no.:
- P63600/6111
- Type:
- Conference Proceedings
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