1.

Conference Proceedings
Conference Proceedings
1. A Novel Etching Method of Single Crystalline Al2O3 Film on Si and Sapphire Using Si Ion Implantation
Kim, H. ; Ishida, M. ; Nakamura, T.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.267-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
2.

Conference Proceedings
Conference Proceedings
2. Epitaxial growth of gamma-al2O3 insulator films on Si by molecular beam epitaxy using an Al solid source and N2O gas
Wado, H. ; Shimizu, T. ; Ohtani, K. ; Jung, Y.C. ; Ishida, M.
Pub. info.: Epitaxial oxide thin films II : symposium held November 26-30, 1995, Boston, Massachusetts, U.S.A..  pp.39-44,  1996.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 401