1.

Conference Proceedings
Conference Proceedings
1. A COMPARISON OF THE GAS PHASE PROCESSES RESULTING FROM SiH4 AND Si2H6 PHOTODISSOCIATION WITH A PULSED ArF EXCIMER LASER
Boch, E. ; Fuchs, C. ; Fogarassy, E. ; Siffert, P.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.195-200,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. TWO-PHOTON ABSORPTION CROSS SECTION FOR SILANE UNDER PULSED ArF (193 nm) EXCIMER LASER IRRADIATION
Fuchs, C. ; Boch, E. ; Fogarassy, E. ; Aka, B. ; Siffert, P.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.361-366,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
3.

Conference Proceedings
Conference Proceedings
3. INFLUENCE OF RAPID THERMAL PROCESSING ON MINORITY CARRIER DIFFUSION LENGTH IN SILICON
Eichammer, Wolfgang A. ; Vu, Thuong-Quat ; Siffert, P.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.185-190,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
4.

Conference Proceedings
Conference Proceedings
4. ANNEALING KINETICS DURING RAPID AND CLASSICAL THERMAL PROCESSING OF LASER AND IMPLANTATION INDUCED DEFECTS IN SILICON
Adekoya, W.O. ; Muller, J.C. ; Siffert, P.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.699-704,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
5.

Conference Proceedings
Conference Proceedings
5. Search For A Correlation Between Stoichiometry, TSC Spectra And Nuclear 217 Spectroscopic Capabilities of HqI2
Koebel, J. M. ; Siffert, P.
Pub. info.: Nuclear radiation detector materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.217-224,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 16
6.

Conference Proceedings
Conference Proceedings
6. DEFECTS PRODUCED BY HIGH ENERGY OXYGEN IONS IMPLANTED IN SILICON
Crob, A. ; Grob, J. J., ; Perio, A. ; Thevenin, P. ; Siffert, P.
Pub. info.: Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A..  pp.197-206,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 147
7.

Conference Proceedings
Conference Proceedings
7. RECRYSTALLIZATION KINETICS DURING FAST THERMAL ANNEALING OF PF+n IMPLANTED SILICON
Adekoya, W.O. ; Muller, J.C. ; Siffert, P. ; Pedulli, L.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.115-122,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
8.

Conference Proceedings
Conference Proceedings
8. ON THE ROLE OF INTERFACIAL DEFECT SITES DURING SOLID PHASE EPITAXIAL REGROWTH OF IMPLANTATION AMORPHIZED SILICON
Adekoya, W. O. ; Hage-Ali, M. ; Muller, J. C. ; Siffert, P.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.447-452,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100
9.

Conference Proceedings
Conference Proceedings
9. +INCOHERENT LIGHT ANNEALING OF GLOW DISCHARGE PF5- IMPLANTED SILICON: ANALYSIS OF DAMAGE RECOVERY AND ELECTRICAL ACTIVATION
Pedulli, L. ; Correra, L. ; Galloni, R. ; Adekoya, O. ; Barhdadi, A. ; Muller, J. C. ; Siffert, P.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.363-366,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
10.

Conference Proceedings
Conference Proceedings
10. OPTICAL PROPERTIES OF LASER INDUCED HEAVILY DOPED SILICON LAYERS
Slaoui, A. ; Fogarassy, E. ; Siffert, P. ; Morphange, J. F. ; Balkanski, M.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.159-166,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23