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19 results

Conference Proceedings

1. Polymers of α-Substituted Benzyl Methacrylates and Aliphatic Aldehydes as New Types of Electron-Beam Resists

Hatada, K. ; Kitayama, T. ; Okamoto, Y. ; Yuki, H. ; Aritome, H. ; Namba, S. ; Nate, K. ; Inoue, T. ; Yokono, H.

Pub. info.:	Materials for microlithography : radiation-sensitive polymers. pp.399-, 1984. Washington, D.C.. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	266

Conference Proceedings

2. PATTERNED CRYSTAL GROWTH OF GaAs BY LASER ASSISTED ATOMIC LAYER EPITAXY

Iwai, S. ; Meguro, T. ; Aoyagi, Y. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.171-176, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

3. MASKLESS PATTERNING OF Cr FILMS USING FOCUSED ION BEAMS

Gamo, K. ; Moriizumi, K. ; Matsui, T. ; Namba, S.

Pub. info.:	Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.531-536, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	27

Conference Proceedings

4. DIFFUSION OF ATOMS IMPLANTED IN POLY SILICON LAYER ON INSULATOR

Takai, M. ; Izumi, M. ; Yamamoto, T. ; Kinomura, A. ; Gamo, K. ; Minasono, T. ; Namba, S.

Pub. info.:	Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.341-346, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	106

Conference Proceedings

5. BURIED METAL DEPOSITION ON GALLIUM ARSENIDE BY LASER INDUCED THERMOCHEMICAL REACTION

Tokuda, J. ; Takai, M. ; Gamo, K. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.261-266, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

6. MICRO-RBS ANALYSIS OF MASKLESSLY FABRICATED STRUCTURES

Kinomura, A. ; Takai, M. ; Matsuo, T. ; Satou, M. ; Kiuchi, M. ; Fujii, K. ; Namba, S.

Pub. info.:	Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.743-748, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	128

Conference Proceedings

7. LASER INDUCED WET-CHEMICAL ETCHING OF Mn-Zn FERRITE IN H3PO4

Lu, Y.F. ; Takai, M. ; Nagatomo, S. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.339-346, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

8. LASER INDUCED CHEMICAL ETCHING OF COMPOSITE STRUCTURE OF FERRITE AND SENDUST

Nagatomo, S. ; Takai, M. ; Lu, Y.F. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.333-338, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

9. MULTILAYER ANALYSIS BY FOCUSED MeV ION BEAM

Takai, M. ; Kinomura, A. ; Izumi, M ; Matsunaga, K. ; Inoue, K. ; Gamo, K. ; Satou, M. ; Namba, S.

Pub. info.:	Electronic packaging materials science III : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.51-58, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	108

10.

Conference Proceedings

10. STEPWISE MONOLAYER GROWTH OF GaAS BY PULSED LASER METAL ORGANIC VAPOR PHASE EPITAXY

Doi, A. ; Aoyagi, Y. ; Namba, S.

Pub. info.:	Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.217-222, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	75

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