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24 results

Conference Proceedings

1. CHEMICAL REACTION PATHWAYS FOR THE DEPOSITION OF AMORPHOUS SILICON-HYDROGEN ALLOYS BY REMOTE PLASMA ENHANCED CVD

Parsons, G.N. ; Tsu, D.V. ; Lucovsky, G.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.263-268, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

Conference Proceedings

2. THE EFFECT OF INTRINSIC IN-PLANE STRESS ON THE LOCAL ATOMIC STRUCTURE OF THEMALLY GROWN SIO2

Fitch, J.T. ; Bjorkman, C.H. ; Sumakeris, J.J. ; Lucovsky, G.

Pub. info.:	Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	130

Conference Proceedings

3. ESTIMATION OF DEFECT STATE DENSITIES FROM BULK PHOTOELECTRONIC PROPERTIES OF A-SI,Ge:H ALLOYS

Parsons, G. N. ; Lucovsky, G.

Pub. info.:	Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.341-346, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	95

Conference Proceedings

4. STRESS GRADIENTS IN SiO2 THIN FILMS PREPARED BY THERMAL OXIDATION AND SUBJECTED TO RAPID THERMAL ANNEALING

Bjorkman, C. H. ; Fitch, J. T. ; Lucovsky, G.

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.197-202, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

Conference Proceedings

5. SILICON SUBOXIDES: THE "CO-DEPOSITION" OF a-Si:H AND SiO2

Tsu, D.V. ; Lucovsky, G. ; Watkins, M.W.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

Conference Proceedings

6. THE EFFECTS OF SURFACE TREATMENT FOR LOW TEMPERATURE SILICON DIOXIDE DEPOSITION ON CADMIUM TELLURIDE

Choi, Seong S. ; Kim, S.S. ; Tsu, D.V. ; Lucovsky, G.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.313-318, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

Conference Proceedings

7. RAPID THERMAL ANNEALING OF LOW TEMPERATURE SILICON DIOXIDE FILMS

Fitch, J. T. ; Lucovsky, G.

Pub. info.:	Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.89-94, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	92

Conference Proceedings

8. THE GROWTH OF SILICON OXIDE FILMS BY REMOTE PLASMA ENHANCED CVD

Tsu, D.V. ; Lucovsky, G.

Pub. info.:	Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.595-602, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	77

Conference Proceedings

9. THE EFFECTS OF SURFACE AND INTERFACE DEPLETION REGIONS ON THE PHOTOCONDUCTIVITY OF a-Si:H IN SURFACE CELL STRUCTURES

Parson, G.N. ; Kusano, C. ; Lucovsky, G.

Pub. info.:	Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.589-594, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	77

10.

Conference Proceedings

10. FORMATION OF DIVICE QUALITY Si/SiO2 INTERFACES IN A MULTICHAMBER INTEGRATED PROCESSING SYSTEM

Kim, S. S. ; Tsu, D. V. ; Lucovsky, G. ; Fountain., G. G. ; Markunas, R. J

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.327-332, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

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