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16 results

Conference Proceedings

1. SRAIN RELIEF BY TITLING OF EPITAXIAL GaAS FILMS ON Si

Schowalter, L.J. ; Hall,E.L. ; Lewis, N. ; Hashimoto, Shin

Pub. info.:	Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.171-178, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	130

Conference Proceedings

2. MACROSCOPIC DEFECTS IN EPITAXIAL SILICON ON SIMOX AND IN ANNEALED SIMOX

Mogro-Campero, A. ; Lewis, N. ; Al-Marayati, S. A.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.123-128, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

3. DEGRADATION OF TiSi2/n+-POLYSILICON INTERFACES DUE TO HIGH TEMPERATURE PROCESSING

Shenai, K. ; Piacente, P. A. ; Smith, G. A. ; Lewis, N. ; McConnell, M . D. ; Norton, J. F. ; Hall, E. L. ; Baliga, B. J.

Pub. info.:	Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.149-154, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	106

Conference Proceedings

4. DEFECTS IN MBE SILICON

Chrenko, R.M. ; Schowalter, L.J. ; Hall, E.L. ; Lewis, N.

Pub. info.:	Layered structures and epitaxy : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.27-32, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	56

Conference Proceedings

5. ON THE ADHESION OF LPCVD WSi2 TO DOPED AND UNDOPED POLYSILICON

Shenai, K. ; Piacente, P.A. ; Lewis, N. ; McConnell, M.D. ; Smith, G.A. ; Baliga, B.J.

Pub. info.:	Adhesion in solids : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.. pp.177-184, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	119

Conference Proceedings

6. THE EFFECT OF DOPING ON THE GRAIN STRUCTURE OF AS-DEPOSITED AND HIGH-TEMPERATURE ANNEALED LPCVD WSi2 FILMS ON POLYSILICON

Lewis, N. ; Shenai, K. ; Smith, G.A. ; Piacente, P.A. ; Baliga, B.J.

Pub. info.:	Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.. pp.421-426, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	138

Conference Proceedings

7. TITANIUM SILICIDE FORMATION ON HEAVILY DOPED ARSENIC-IMPLANTED SILICON

Dowben, S. L. ; Marsh, D. W. ; Smith, G. A. ; Lewis, N. ; Chow, T. P. ; Katz, W.

Pub. info.:	Applied materials characterization : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.355-364, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	48

Conference Proceedings

8. EFFECT OF ION BOMBARDMENT ON THE DOPANT DIFFUSION DURING REACTIVE ION ETCHING (RIE) OF DIELECTRIC FILMS DEPOSITED ON SILICON

Shenai, K. ; Lewis, N. ; Smith, G.A. ; Baliga, B.J.

Pub. info.:	Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.731-736, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	128

Conference Proceedings

9. GROWTH AND CHARACTERIZATION OF EPITAXIAL Si/CoSi2 AND Si/CoSi2/Si HETEROSTRUCTURES

Hunt, B.D. ; Lewis, N. ; Hall, E.L. ; Turner, L.G. ; Schowalter, L.J. ; Okamoto, Masako ; Hashimoto, Shin

Pub. info.:	Layered structures and epitaxy : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.151-156, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	56

10.

Conference Proceedings

10. STRUCTURAL CHARACTERIZATION AND SCHOTTKY BARRIER HEIGHT MEASUREMENTS OF EPITAXIAL NiSi2 ON Si

Hunt, B.D. ; Schowalter, L.J. ; Lewis, N. ; Hall, E.L. ; Hauenstein, R.J. ; Schlesinger, T.E. ; McGill, T.C. ; Okamoto,Masako ; Hashimoto, Shin

Pub. info.:	Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.479-484, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	54

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