1.

Conference Proceedings

Conference Proceedings
Chen,X. ; Frauenglass,A. ; Brueck,S.R.J.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.496-502,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings

Conference Proceedings
Ghazanfarian,A.A. ; Chen,X. ; McCord,M.A. ; Pease,R.F.W.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.502-509,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings

Conference Proceedings
Yao,H. ; Luo,X. ; Chen,X. ; Feng,B.
Pub. info.: Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.253-260,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3741
4.

Conference Proceedings

Conference Proceedings
Chen,X. ; Ghazanfarian,A.A. ; McCord,M.A. ; Pease,R.F.W.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.951-957,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
5.

Conference Proceedings

Conference Proceedings
Chen,X. ; Berger,H. ; Chaux,R.
Pub. info.: Current developments in optical design and optical engineering VIII : 19-21 July 1999, Denver, Colorado.  pp.65-72,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3779
6.

Conference Proceedings

Conference Proceedings
He,L. ; Yang,J. ; Wang,S. ; Yu,M. ; Wu,Y. ; Qiao,Y. ; Chen,X. ; Fang,W. ; Zhang,Q. ; Gui,Y. ; Chu,J.
Pub. info.: Detectors, focal plane arrays, and imaging devices II : 18-19 September 1998, Beijing, China.  pp.13-22,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3553
7.

Conference Proceedings

Conference Proceedings
Chen,X. ; Yang,D. ; Jiang,Y. ; Wu,Z. ; Wang,S. ; Li,D.
Pub. info.: Smart structures and materials 1997 : Smart materials technologies : 3-4 March 1997, San Diego, California.  pp.271-278,  1997.  Bellingham.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3040
8.

Conference Proceedings

Conference Proceedings
Chen,X. ; Yang,D. ; Jiang,Y. ; Wu,Z. ; Wang,S. ; Li,D.
Pub. info.: Smart structures and materials 1997 : Smart materials technologies : 3-4 March 1997, San Diego, California.  pp.264-270,  1997.  Bellingham.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3040
9.

Conference Proceedings

Conference Proceedings
Chen,X. ; Miyatsuka,Y. ; Takahashi,Y. ; Murai,S.
Pub. info.: Videometrics V : 30-31 July 1997, San Diego, California.  pp.50-59,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3174
10.

Conference Proceedings

Conference Proceedings
Chen,X. ; Esterson,M. ; Lindsay,P.A.
Pub. info.: Intense microwave pulses IV : 7-8 August 1996, Denver, Colorado.  pp.47-56,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2843