1.

Conference Proceedings
Conference Proceedings
1. Pulsed EPR Studies of the Tv2a Center in 4H-SiC
J. Isoya ; T. Umeda ; N. Mizuochi ; T. Ohshima
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.353-356,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
2.

Conference Proceedings
Conference Proceedings
2. Identification of the Negative Di-Carbon Antisite Defect in n-Type 4H-SiC
A. Gali ; T. Umeda ; E. Janzen ; N. Morishita ; T. Ohshima
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.361-364,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
3.

Conference Proceedings
Conference Proceedings
3. Photo-EPR Study of Vacancy-Type Defects in Irradiated n-Type 4H-SiC
T. Umeda ; N. Morishita ; T. Ohshima ; H. Itoh ; J. Isoya
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.409-412,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
4.

Conference Proceedings
Conference Proceedings
4. Effect of Fe Content on Hot Tearing of High-Strength Al-Mg-Si Alloy
H. Nagaum ; S. Suzuki ; T. Okane ; T. Umeda
Pub. info.: THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canad.  539-543  pp.380-385,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 539-543(1)
5.

Conference Proceedings
Conference Proceedings
5. Electron Paramagnetic Resonance Study of Carbon Antisite-Vacancy Pair in p-Type 4H-SiC
T. Umeda ; N. Morishita ; T. Ohshima ; H. Itoh ; J. Isoya
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.453-456,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
6.

Conference Proceedings
Conference Proceedings
6. Deep Acceptor Levels of the Carbon Vacancy-Carbon Antisite Pairs in 4H-SiC
P. Carlsson ; N.T. Son ; T. Umeda ; J. Isoya ; E. Janzen
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.449-452,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
7.

Conference Proceedings
Conference Proceedings
7. EPR Identification of Defects and Impurities in SiC: To be Decisive
J. Isoya ; T. Umeda ; N. Mizuochi ; N.T. Son ; E. Janzén
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.279-284,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
8.

Conference Proceedings
Conference Proceedings
8. The first on-site evaluation of a new filter optimized for TARC and developer
T. Umeda ; T. Ishibashi ; A. Nakamura ; J. Ide ; M. Nagano
Pub. info.: Lithography Asia 2008.  2  pp.71402Z-1-71402Z-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
9.

Conference Proceedings
Conference Proceedings
9. Mask protection from a haze during shipping and storage
T. Umeda ; H. Kawashima ; T. Miho ; K. Moriya
Pub. info.: Photomask technology 2007.  3  pp.67304Q-1-67304Q-11,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730