1.

Conference Proceedings

Conference Proceedings
Willson,C.G. ; Yueh,W. ; Leeson,M.J. ; Steinhasler,T. ; McAdams,C.L. ; Dammel,R.R. ; Sounik,J.R. ; Aslam,M. ; Vicari,R. ; Sheehan,M.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.226-237,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
2.

Conference Proceedings

Conference Proceedings
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.28-41,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
3.

Conference Proceedings

Conference Proceedings
Ficner,S.A. ; Dammel,R.R. ; Perez,Y.M. ; Gardiner,A.B. ; Willson,C.G.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.838-849,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
4.

Conference Proceedings

Conference Proceedings
Blair,S.L. ; Chu,C.W. ; Dammel,R.R. ; Hill,R.H.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.829-837,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
5.

Conference Proceedings

Conference Proceedings
Gardiner,A.B. ; Qin,A. ; Henderson,C.L. ; Pancholi,S. ; Koros,W.J. ; Willson,C.G. ; Dammel,R.R. ; Mack,C.A. ; Hinsberg,W.D.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.850-860,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
6.

Conference Proceedings

Conference Proceedings
Eakin,R.J. ; Detweiler,S.F. ; Stagaman,G.J. ; Tesauro,M. ; Spak,M.A. ; Dammel,R.R.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.397-408,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
7.

Conference Proceedings

Conference Proceedings
Mack,C.A. ; Mueller,K.E. ; Gardiner,A.B. ; Qin,A. ; Dammel,R.R. ; Koros,W.J. ; Willson,C.G.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.355-362,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
8.

Conference Proceedings

Conference Proceedings
Dammel,R.R. ; Sagan,J.P. ; Synowicki,R.A.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.963-973,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
9.

Conference Proceedings

Conference Proceedings
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.28-41,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
10.

Conference Proceedings

Conference Proceedings
Ding,S. ; Lu,P.-H. ; Dammel,R.R. ; Shan,J. ; Mehtsun,S. ; Hannigan,T.T. ; Eberly,D.E. ; Khanna,D.N. ; Tanaka,H.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.765-774,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049