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12 results

Conference Proceedings

1. Experimental demonstration of using microelectromechanical deformable mirrors to control optical aberrations

Roggemann,M.C. ; Bright,V.M. ; Welsh,B.M. ; Hick,S.R. ; Roberts,P.C. ; Cowan,W.D. ; Comtois,J.H.

Pub. info.:	Adaptive optics and Adaptive optics and applications : 30 July-1 August 1997, San Diego, California. pp.173-184, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3126

Conference Proceedings

2. Designs to improve polysilicon micromirror surface topology

Burns,D.M. ; Bright,V.M.

Pub. info.:	Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.100-110, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3008

Conference Proceedings

3. Microactuated mirrors for beam steering

Gustafson,S.C. ; Little,G.R. ; Burns,D.M. ; Bright,V.M. ; Watson,E.A.

Pub. info.:	Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.91-99, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3008

Conference Proceedings

4. Scanning and rotating micromirrors using thermal actuators

Butler,J.T. ; Bright,V.M. ; Reid,J.R.

Pub. info.:	Optical scanning systems: design and applications : 30-31 July, 1997, San Diego, California. pp.134-144, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3131

Conference Proceedings

5. Optical beam steering using surface micromachined gratings and optical phased arrays

Burns,D.M. ; Bright,V.M. ; Gustafson,S.C. ; Watson,E.A.

Pub. info.:	Optical scanning systems: design and applications : 30-31 July, 1997, San Diego, California. pp.99-110, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3131

Conference Proceedings

6. Modeling of stress-induced curvature in surface-micromachined devices (Invited Paper)

Cowan,W.D. ; Bright,V.M. ; Elvin,A.A. ; Koester,D.A.

Pub. info.:	Microlithography and Metrology in Micromachining III. pp.56-67, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3225

Conference Proceedings

7. Measuring frequency response of surface-micromachined resonators

Cowan,W.D. ; Bright,V.M. ; Dalton,G.C.

Pub. info.:	Microlithography and Metrology in Micromachining III. pp.32-43, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3225

Conference Proceedings

8. Nonlinear flexures for stable deflection of an electrostatically actuated micromirror

Burns,D.M. ; Bright,V.M.

Pub. info.:	Microelectronic Structures and MEMS for Optical Processing III. pp.125-136, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3226

Conference Proceedings

9. Extension of high-density interconnect multichip module technology for MEMS packaging

Butler,J.T. ; Bright,V.M. ; Saia,R.J. ; Comtois,J.H

Pub. info.:	Micromachined Devices and Components III. pp.169-177, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

10.

Conference Proceedings

10. Vertical thermal actuators for micro-optoelectromechanical Systems

Cowan,W.D. ; Bright,V.M.

Pub. info.:	Microelectronic Structures and MEMS for Optical Processing III. pp.137-146, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3226

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