1.

Conference Proceedings

Conference Proceedings
Chen, J. ; Yue, C. ; Zhang, Y. ; Wang, X. ; Zuo, T.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.205-210,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings

Conference Proceedings
Chen, J. ; Wang, X. ; Zuo, T.
Pub. info.: Smart Sensors, Actuators, and MEMS.  2  pp.647-651,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
3.

Conference Proceedings

Conference Proceedings
Chen, J. ; Wang, X. ; Yue, C. ; Zuo, T.
Pub. info.: Lasers in Material Processing and Manufacturing II.  pp.232-236,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5629