1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF METAL ATOMS AND LIGAND COMEINATIONS IN ORGANOMETALLICS ON EXCIMER LASER PHOTOPRODUCTS AND YIELD
Zhang, Y. ; Stuke, M.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.375-382,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
2.

Conference Proceedings
Conference Proceedings
2. *FUNDAMENTALS OF LASER PHOTOCHEMISTRY FOR SURFACE MODIFICATION
Stuke, M. ; Zhang, Y. ; Kuper, S.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.139-150,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101