1.

Conference Proceedings
Conference Proceedings
1. Thin Film Stress Measurement With a Tunneling Sensor
Zhang, P. ; Vinci, R.P. ; Bravman, J.C. ; Kenny, T.W.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.45-50,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
2.

Technical Paper
Technical Paper
2. Soft integrated assembly systems
Weston, R.H. ; Zhang, P. ; Murgatroyd, I.S. ; Coutts, I.A. ; Hodgson, A.
Pub. info.: SME technical paper series.  pp.1P-,  1991.  Society of Manufacturing Engineers