1.

Conference Proceedings
Conference Proceedings
1. Piezoceramic actuated aperture antennas
Yoon,H.-S. ; Washington,G.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.156-163,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of lens aberrations depending on the transmittance of DUV-attenuated PSM
Park,J.-H. ; Kim,Y.-H. ; Lim,S.-C. ; Lee,K.-H. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.937-942,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Testing and development of doubly curved piezoceramic aperture antennas
Yoon,H.-S. ; Washington,G.
Pub. info.: Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California.  pp.173-180,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3673
4.

Conference Proceedings
Conference Proceedings
4. Analysis of photomask CD errors depending on development methods
Moon,S.-Y. ; Ki,W.-T. ; Cha,B.-C. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.573-576,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
5.

Conference Proceedings
Conference Proceedings
5. Detectability and printability of programmed defect reticle for 256-Mb dram
Park,J.H. ; Cho,H.-K. ; Kim,Y.-H. ; Lee,K.-H. ; Yoon,H.-S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.300-311,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
6.

Conference Proceedings
Conference Proceedings
6. Evaluation of the practical use of GHOST technique for various e-beam resists
Cha,B.-C. ; Kim,J.-M. ; Kim,B.-G. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.55-62,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
7.

Conference Proceedings
Conference Proceedings
7. Correction method for radial effect caused by spin process
Kim,J.-M. ; Choi,S.-W. ; Cha,B.-C. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.466-472,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884