Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.435-445, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part1 pp.307-315, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.783-791, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering