Blank Cover Image

DIELECTRICS ON SILICON THERMALLY GROWN OR ANNEALED IN A NITROGEN RICH ENVIRONMENT

Author(s):
Harrison, H. B.
Misiura, A.
Dimitrijev, S.
Sweatman, D.
Yao, Z.
Yeow, Y. T.
1 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
151
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characteristics of Dielectrics Formed or Annealed in a Nitric Oxide Ambient

Harrison, H. B., Yao, Z.-Q., Dimitrijev, S., Sweatman, D., Yeow, Y.-T.

MRS - Materials Research Society
7 Conference Proceedings Combined Thermal and UV Growth of Thin Dielectrics on Silicon in an NO Environment

Jamet, P., Tanner, P., Harrison, H. B., Dimitrijev, S.

MRS - Materials Research Society
2 Conference Proceedings High-quality sub-5-nm oxynitride dielectric films grown on silicon in a nitric oxide ambient using rapid thermal processing

Z.-Q. Yao, H.B. Harrison, S. Dimitrijev, Y.T. Yeow

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Characterisation of Dielectric Damage in MOS Capacitors by a New Current Transient Measurement Technique

Tanner, P. G., Dimitrijev, Sima, Yeow, Y-T., Harrison, H. B.

MRS - Materials Research Society
3 Conference Proceedings Improving SiO2 Grown on P-Type 4H-SiC by NO Annealing

Li,H.F., Dimitrijev,S., Harrison,H.B., Sweatman,D., Tanner,P.T.

Trans Tech Publications
9 Conference Proceedings Nitrogen in Ultra Thin Silicon Dielectrics

Harrison, H.B., Li, H.F., Dimitrijev, S., Tanner, P.

Electrochemical Society
4 Conference Proceedings Hot-Carrier Properties of Sub-Micron MOSFETs with NO-Annealed Gate Oxides

Yao, Z.-Q., Ghodsi, R., Harrison, H.B., Dimitrijev, S., Yeow, T.Y.

Electrochemical Society
10 Conference Proceedings Effect of NO on the Electrical Characteristics of SiO2 Grown on p-Type 4H SiC

Li, H. F., Dimitrijev, S., Harrison, H. B., Sweatman, D., Tanner, P.

MRS - Materials Research Society
5 Conference Proceedings Nitrided Gate Dielectrics and Charge-to-Breakdown Test

Dimitrijev, S., Tanner, P., Harrison, H. B., Sweatman, D.

MRS - Materials Research Society
11 Conference Proceedings Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques

Ngo,N.Q., Rosa,M.A., Sweatman,D., Dimitrijev,S., Harrison,H.B., Titmarsh,A.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings XPS Analysis of SiO2/SiC Interface Annealed in Nitric Oxide Ambient

Li, H. -F., Dimitrijev, S., Sweatman, D., Harrison, H. B.

Trans Tech Publications
12 Conference Proceedings Model for the growth of oxides in N2O

S. Dimitrijev, H.B. Harrison, D.R. Sweatman

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12