1.

Conference Proceedings
Conference Proceedings
1. DRY PROCESS FOR THE DEFINITION OF SUB 0.lμm W/TiN GATES
Rotondaro, A.L.P. ; Yang, H. ; Hu, J.C. ; Kraft, R. ; Brown, G. ; Appel, C.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.344-349,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. Factors Affecting the Porosity of ZSM-5 Layer on the Surface of Stainless Steel
Shan, Z. ; Min, E. ; Yang, H.
Pub. info.: Progress in zeolite and microporous materials : proceedings of the 11th International Zeolite Conference, Seoul, Korea, August 12-17, 1996.  C  pp.2155-,  1997.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 105
3.

Conference Proceedings
Conference Proceedings
3. Stress in Ag/Ni Multilayers: A Comparison of Specimen-Curvature and X-ray-Diffraction Methods
Gergaud, P. ; Labat, S. ; Yang, H. ; Bottger, A. ; Sandstrom, P. ; Svedberg, Erik ; Mittemeijer, E. J. ; Sundgren, J. E. ; Thomas, O.
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.299-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
4.

Conference Proceedings
Conference Proceedings
4. Chemical Bonding of Fluorine Atoms in SiOF Alloys: Microscopic Mechanisms for Reductions in the Dielectric Constant Relative to SiO2
Lucovsky, G. ; Yang, H.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.111-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
5.

Conference Proceedings
Conference Proceedings
5. Microscopic Mechanisms for Reduced Static Dielectric Constants in Si-O-F Alloy Films
Yang, H. ; Lucovsky, G.
Pub. info.: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.273-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 476