1.

Conference Proceedings

Conference Proceedings
Wu, T. H. ; Lin, C. L. ; Chen, M. J. ; Tsai, Z. H. ; Ao, C. Y. ; Thung, H. C. ; Liou, J. S. ; Yang, C. H. ; Lin, L. C.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
2.

Conference Proceedings

Conference Proceedings
Cheng, Y. F. ; Chou, Y. L. ; Yang, C. H.
Pub. info.: Optical Microlithography XIX.  pp.61542D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings

Conference Proceedings
Su, B. ; Verma, G. ; Wolk, W. ; Ahmadian, M. ; Du, H. ; Vikram, A. ; Andrews, S. ; Cheng, Y. F. ; Chou, Y. L. ; Yang, C. H. ; Lin, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599244-599244,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992