1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Advanced process control for deep sub-100nm gate fabrication
Goto, T. K. ; Tajima, M. ; Harada, F. ; Kato, T. ; Yamazaki, T. ; Taguchi, T.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.18-28,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
3.

Conference Proceedings
Conference Proceedings
3. Phased Array Antenna for Telemetry System
Fukutani, K. ; Yamazaki, T. ; Sunaoka, M.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
4.

Conference Proceedings
Conference Proceedings
4. Incoherent High-Resolution Z-Contrast Imaging of Silicon and Gallium Arsenide Using HAADF-STEM
Kikuchi, Y. ; Kotaka, Y. ; Watanabe, K. ; Yamazaki, T.
Pub. info.: Advances in materials problem solving with the electron microscope : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.185-190,  2001.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 589
5.

Technical Paper
Technical Paper
5. Analysis of Cyclic Variations of Combustion in High Compression Ratio Boosted D.I.S.I. Engine by Ion-Current Probes and CFD.
Tanaka, D. ; Oki, H. ; Yamazaki, T. ; Miura, A. ; Tsukahara, E.
Pub. info.: 2009 SAE world congress : technical paper.  2009.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2009
6.

Technical Paper
Technical Paper
6. Development of Continuous Variable Valve Event and Lift Control System for SI Engine. (VEL)
Yamada, Y. ; Machida, K. ; Yamazaki, T.
Pub. info.: 2008 SAE world congress : technical paper.  2008.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2008
7.

Conference Proceedings
Conference Proceedings
7. GT40A: durable 45-W ArF injection-lock laser light source fordryjimmersion lithography [6154-99]
Tanaka, S. ; Tsushima, H. ; Nakaike, T. ; Yamazaki, T. ; Saito, T. ; Tomaru, H. ; Kakizaki, K. ; Matsunaga, T. ; Suzuki, T. ; Wakabayashi, O. ; Nagai, S. ; Fujimoto, J. ; Inoue, T. ; Mizoguchi, H
Pub. info.: Optical Microlithography XIX.  pp.61542O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. Ultra line-narrowed ArF excimer laser G42A for sub-90-nm lithography generation
Saito, T. ; Suzuki, T. ; Yoshino, M. ; Wakabayashi, O. ; Matsunaga, T. ; Fujimoto, J. ; Kakizaki, K. ; Yamazaki, T. ; Inoue, T. ; Terashima, K. ; Enami, T. ; Inoue, H. ; Sumitani, A. ; Tomaru, H. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1704-1711,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
9.

Conference Proceedings
Conference Proceedings
9. Dry-etch resistance of fluorine functionalized polymers
Koh, M. ; Ishikawa, T. ; Araki, T. ; Aoyama, H. ; Yamashita, T. ; Yamazaki, T. ; Watanabe, H. ; Toriumi, M. ; Itani, T.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.486-496,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
10.

Conference Proceedings
Conference Proceedings
10. 157-nm single-layer resists based on advanced fluorinated polymers
Shida, N. ; Watanabe, H. ; Yamazaki, T. ; Ishikawa, S. ; Toriumi, M. ; Itani, T.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.497-503,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690