1.

Conference Proceedings

Conference Proceedings
Bowden, M. ; Gardiner, D. J. ; Lourenco, M. A. ; Hedley, J. ; Wood, D. ; Burdess, J. S. ; Harris, A. J.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.239-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Technical Paper

Technical Paper
Cox, S. ; Beck, G. ; Cornwall, C. ; Davis, J. ; Hein, P. ; Lappen, C. ; Song, R. ; Withrow, J. ; Wood, D. ; Alvarez, J. ; Anikin, P.
Pub. info.: NASA Technical Reports.  (NASA-CR-193162),  pp.1-85,  1992.  National Aeronautics and Space Adminstration