Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.432-442, 1994. Pennington, NJ. Electrochemical Society
Wilson, S.R. ; Hwang, B.Y. ; Foerstner, J. ; Wetteroth, T. ; Racanelli, M. ; Tsao, J. ; Huang, M.
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Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.413-424, 1994. Pennington, NJ. Electrochemical Society