1.

Conference Proceedings
Conference Proceedings
1. High-accuracy laser mask repair system LM700A
Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Ueda,A. ; Haneda,T. ; Oomiya,M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.663-669,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
2.

Conference Proceedings
Conference Proceedings
2. Spectral measurement of ultra line-narrowed F2 laser
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
3.

Conference Proceedings
Conference Proceedings
3. Laser mask repair system LM700A
Ueda,A. ; Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Haneda,T. ; Ohmiya,M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.574-582,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409