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Process and mechanism of CoSi2/Si solid phase emitaxy by multilayer reaction

Author(s):
Publication title:
Nucleation and growth processes in materials : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
580
Pub. Year:
2000
Page(from):
117
Pub. info.:
Pittsburgh, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994881 [1558994882]
Language:
English
Call no.:
M23500/580
Type:
Conference Proceedings

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