Von Mises Stress in CMP Processes
- Author(s):
Wang, D. Beaudoin, S. Cale, T.S. Lee, J. Holland, K. Bibby, T. - Publication title:
- Proceedings of the First International Symposium on Chemical Mechanical Planarization
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 96-22
- Pub. Year:
- 1996
- Page(from):
- 97
- Page(to):
- 109
- Pages:
- 13
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771726 [1566771722]
- Language:
- English
- Call no.:
- E23400/970318
- Type:
- Conference Proceedings
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