1.

Conference Proceedings

Conference Proceedings
Allgair,J. ; Archie,C.N. ; Banke,W. ; Bogardus,H. ; Griffith,J.E. ; Marchman,H.M. ; Postek,M.T. ; Saraf,L.H. ; Schlesinger,J.E. ; Singh,B. ; Sullivan,N.T. ; Trimble,L.E. ; Vladar,A.E. ; Yanof,A.W.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.138-150,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings

Conference Proceedings
Vladar,A.E.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.192-198,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
3.

Conference Proceedings

Conference Proceedings
Zhang,N.F. ; Postek,M.T. ; Larrabee,R.D. ; Vladar,A.E. ; Keery,W.J. ; Jones,S.N.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.375-387,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
4.

Conference Proceedings

Conference Proceedings
Postek,M.T. ; Vladar,A.E. ; Davidson,M.P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.68-79,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
5.

Conference Proceedings

Conference Proceedings
Lowney,J.R. ; Vladar,A.E. ; Postek,M.T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.515-526,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
6.

Conference Proceedings

Conference Proceedings
Postek,M.T. ; Vladar,A.E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.504-514,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725