1.

Conference Proceedings

Conference Proceedings
Silver,R.M. ; Jensen,C.P. ; Tsai,V.W. ; Fu,J. ; Villarrubia,J.S. ; Teague,E.C.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.441-460,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings

Conference Proceedings
Villarrubia,J.S.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.10-18,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
3.

Conference Proceedings

Conference Proceedings
Kramar,J. ; Jun,J.S. ; Penzes,W.B. ; Scire,F. ; Teague,E.C. ; Villarrubia,J.S.
Pub. info.: Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado.  pp.46-53,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3806
4.

Conference Proceedings

Conference Proceedings
Cresswell,M.W. ; Sniegowski,J.J. ; Ghoshtagore,R.N. ; Allen,R.A. ; Linholm,L.W. ; Villarrubia,J.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.659-676,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725