1.

Conference Proceedings
Conference Proceedings
1. A new designed ultra-high precision profiler [5921-07]
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Ueno, K. ; Mori, Y.
Pub. info.: Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA.  pp.592107-592107,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5921
2.

Conference Proceedings
Conference Proceedings
2. Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror [6317-11]
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Uchikoshi, J. ; Ueno, K. ; Mori, Y.
Pub. info.: Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA.  pp.63170B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6317
3.

Conference Proceedings
Conference Proceedings
3. Analysis of High Leakage Currents in 4H-SiC Schottky Barrier Diodes Using Optical Beam-Induced Current Measurements
Tsuji, T. ; Izumi, S. ; Ueda, A. ; Fujisawa, H. ; Ueno, K. ; Tsuchida, H. ; Kamata, I. ; Jikimoto, T. ; Izumi, K.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.1141-1144,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
4.

Conference Proceedings
Conference Proceedings
4. Electroluminescence Analysis of Al+ and B+ Implanted pn Diodes
Fujisawa, H. ; Tsuji, T. ; Izumi, S. ; Ueno, K. ; Kamata, I. ; Tsuchida, T. ; Jikimoto, T. ; Izumi, K.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.1297-1300,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
5.

Conference Proceedings
Conference Proceedings
5. Submicron focusing of hard x-ray beam by elliptically figured mirrors for scanning x-ray microscopy
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Ueno, K. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.58-64,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
6.

Conference Proceedings
Conference Proceedings
6. Reliability of Damascene Copper Interconnects (Invited paper)
Ueno, K. ; Ishigami, T. ; Kakuhara, Y. ; Kawano, M.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.408-418,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
7.

Conference Proceedings
Conference Proceedings
7. Channel Doped SiC-MOSFETs
Ogino, S. ; Oikawa, T. ; Ueno, K.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1101-1104,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(2)
8.

Conference Proceedings
Conference Proceedings
8. Optical Beam Induced Current Analysis of High-Voltage 4H-SiC Schottky Rectifiers
Tsuji, T. ; Asai, R. ; Ueno, K. ; Ogino, S.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1195-1198,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(2)
9.

Conference Proceedings
Conference Proceedings
9. Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam
Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Matsuyama, S. ; Yumoto, H. ; Ueno, K. ; Shibahara, M. ; Endo, K. ; Yabashi, M. ; Tamasaku, K. ; Nishino, Y. ; Ishikawa, T. ; Mori, Y.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.116-123,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
10.

Conference Proceedings
Conference Proceedings
10. Microstitching interferometry for nanofocusing mirror optics
Mimura, H. ; Yumoto, H. ; Matsuyama, S. ; Yamamura, K. ; Sano, Y. ; Ueno, K. ; Endo, K. ; Mori, Y. ; Yabashi, M. ; Tamasaku, K. ; Nishino, Y. ; Ishikawa, T. ; Yamauchi, K.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.171-180,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533