M. Oldsen ; U. Hofmann ; H. J. Quenzer ; J. Janes ; C. Stolte
Pub. info.:
Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA. pp.688208-1-688208-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
U. Hofmann ; M. Oldsen ; H.-J. Quenzer ; J. Janes ; M. Heller
Pub. info.:
MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA. pp.688706-1-688706-15, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering