1.

Conference Proceedings
Conference Proceedings
1. Restructuration-Doping Process Near the Poly Si/SiO2 Interface on Silicon During the Phosporus Diffusion
Gaiseanu, F. ; Dimitriadis, C.A. ; Stoemenos, J. ; Postolache, C. ; Tsoukalas, D. ; Kruger, D. ; Tsoi, E.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1289-1296,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Estimation of Point Defect Fundamental Properties Using SOI Structures and Devices
Tsoukalas, D. ; Tsamis, C. ; Kouvatsos, D. ; Skarlatos, D.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.348-358,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
3.

Conference Proceedings
Conference Proceedings
3. POINT DEFECT INJECTION IN SILICON DURING THIN OXIDE FORMATION
Skarlatos, D. ; Omri, M. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.914-925,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
4.

Conference Proceedings
Conference Proceedings
4. On the Electrical Properties of Silicon Wafer Bonding Structures: Evidence of Anomalous Pile-up of Phosphorus
Dimitrakis, P. ; Hatzandroulis, S. ; Tsoukalas, D. ; Stoimenos, J. ; Papaioannou, G.J.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.373-380,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
5.

Conference Proceedings
Conference Proceedings
5. Point Defect Injection Kinetics by N2O Oxidation of Silicon
Tsamis, C. ; Kouvatsos, D. N. ; Tsoukalas, D.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.133-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
6.

Conference Proceedings
Conference Proceedings
6. Estimation of the Number of Injected Interstitial Atoms During Nitrous Oxidation of Silicon
Skarlatos, D. ; Giles, L. F. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.289-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568