1.

Conference Proceedings

Conference Proceedings
Liebmann, L. ; Mansfield, S. ; Han, G. ; Culp, J. ; Hibbeler, J. ; Tsai, R.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Lin, W. ; Liao, S. ; Tsai, R. ; Yeh, M. ; Hsieh, C. ; Yu, Y. ; Lin, B. S. ; Fu, S. ; Dziura, T. G.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.138-144,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
3.

Conference Proceedings

Conference Proceedings
Mango, R. ; Boos, J. B. ; Campbell, P. M. ; Bennet, B. R. ; Glasser, E. R. ; Tinkham, B. P. ; Ancona, M. G. ; Hobart, K. D. ; Kruppa, W. ; Ikossi, K. ; Papanicolaou, N. A. ; Park, D. ; Shanabrook, B. V. ; Mittereder, J. ; Chang, W. ; Bass, R. ; Mohney, S. E. ; Wang, S. ; Robinson, J. ; Tsai, R. ; Barsky, M. ; Lange, M. D. ; Gutierrez, A.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.191-204,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-02