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Diagnostic Tools and Characterisation Techniques for Large Area Integrated Capacitors on High Resistivity Microstrip Detectors

Author(s):
Lucchetti, D.
Bozzi, C.
Dell'Orso, R.
Messineo, A.
Tonelli, G.
Verdini, P.G.
Wheadon, R.
Della Marina, R.
Weiss, P.
Diligenti, A.
Nannini, A.
6 more
Publication title:
Proceedings of the Fifth International Symposium on High Purity Silicon V
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-13
Pub. Year:
1998
Page(from):
456
Page(to):
468
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772075 [1566772079]
Language:
English
Call no.:
E23400/98-13
Type:
Conference Proceedings

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