1.

Conference Proceedings
Conference Proceedings
1. Micro-Mapping of Fe Atoms Aggregated on MOS Device Structure
Tomita, H. ; Saito, M. ; Nadahara, S. ; Shiotani, H. ; Muraoka, H.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.422-431,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
2.

Conference Proceedings
Conference Proceedings
2. C49-TiSi2 Epitaxial Orientation Dependence of the C49-to-C54 Phase Transformation Rate
Nakamura, T. ; Ikeda, K. ; Tomita, H. ; Komiya, S. ; Nakajima, K.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.213-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514