Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.555-560, 1987. Pittsburgh, Pa.. Materials Research Society
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.125-132, 1986. Pittsburgh, Pa.. Materials Research Society
Im, J. S. ; Chen, C. K. ; Thompson, C. V. ; Geis, M. W. ; Tomita, H.
Pub. info.:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.169-174, 1988. Pittsburgh, Pa.. Materials Research Society