1.

Conference Proceedings

Conference Proceedings
Im, J.S. ; Thompson, C.V. ; Tomita, H.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.555-560,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
2.

Conference Proceedings

Conference Proceedings
Tomita, H. ; Kojima, A. ; Usui, S.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.125-132,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
3.

Conference Proceedings

Conference Proceedings
Im, J. S. ; Chen, C. K. ; Thompson, C. V. ; Geis, M. W. ; Tomita, H.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.169-174,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107