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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.394-403, 1997. Pennington, NJ. Electrochemical Society
Tardif, F. ; Joly, J.-P. ; Courteaux, A. ; Straube, U. ; Danel, A. ; Kamarinos, G.
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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.385-393, 1997. Pennington, NJ. Electrochemical Society
Patruno, P. ; Levy, D. ; Fleury, A. ; Tonti, A. ; Tardif, F.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.195-205, 1994. Pennington, NJ. Electrochemical Society
Danel, A. ; Straube, U. ; Kamarinos, G. ; Kamieniecki, E. ; Tardif, F.
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.400-407, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.120-127, 1997. Pennington, NJ. Electrochemical Society
Patruno, P. ; Fleury, A. ; Wyborn, H. ; Andre, E. ; Tardif, F.
Pub. info.:
Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX). pp.93-100, 1994. Pennington, NJ. Electrochemical Society
Constant, I. ; Marthon, S. ; Lardin, T. ; David, C. ; Jacquemond, M.N. ; Tardif, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.626-633, 1997. Pennington, NJ. Electrochemical Society
Cowache, C. ; Boelen, P. ; Kashkoush, I. ; Besson, P. ; Tardif, F.
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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.59-68, 1999. Pennington, NJ. Electrochemical Society
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.453-460, 1999. Pennington, NJ. Electrochemical Society