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11 results

Conference Proceedings

1. Shape-free coupling-hole-type CO2 laser with arbitrary beam pattern: application feasibility to micromachinery

Tanaka,S. ; Sato,H.

Pub. info.:	Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan. pp.474-477, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4416

Conference Proceedings

2. Mechanical properties of SiB6 addition of carbon sintered body

Tanaka,S. ; Fukushima,N. ; Matsushita,J. ; Akatsu,T. ; Niihara,K. ; Yasuda,E.

Pub. info.:	Smart materials. pp.346-354, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4234

Conference Proceedings

3. Thermoelectric properties of SiB6-C composites

Fukushima,N. ; Gomi,T. ; Tanaka,S. ; Matsushita,J.

Pub. info.:	Smart materials. pp.355-363, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4234

Conference Proceedings

4. New concept photomask repeater with stitching exposure technique

Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. pp.34-45, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

5. New-concept i-line stepper for mask fabrication

Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VII. pp.641-648, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4066

Conference Proceedings

6. New photomask Pattern generation method based on i-line stepper

Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VII. pp.631-640, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4066

Conference Proceedings

7. Management of pattern generation system based on I-line stepper

Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. pp.494-502, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

8. Extremely high-NA high-throughput-scanner-compatible 4-kHz KrF excimer laser for DUV lithography

Matsunaga,T. ; Enami,T. ; Kakizaki,K. ; Saito,T. ; Tanaka,S. ; Nakarai,H. ; Inoue,T. ; Igarashi,T.

Pub. info.:	Optical Microlithography XIV. 4346 pp.1617-1626, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

Conference Proceedings

9. Dye-doped organic polymer thin film waveguide laser

Ohmori,R. ; Tanaka,S. ; Watanabe,A. ; Hayakawa,S. ; Sato,H.

Pub. info.:	Optoelectronic Information Systems and Processing. pp.147-152, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4513

10.

Conference Proceedings

10. Pattern-transmitting CO2 laser using arbitrarily shaped coupling-hole mirror

Tanaka,S. ; Sato,H.

Pub. info.:	Optoelectronic Information Systems and Processing. pp.153-158, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4513

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