Miyazawa, K. ; Fujino, M. ; Minato, J. ; Yoshii, T. ; Kizuka, T. ; Suga, T.
Pub. info.:
Smart materials III : 13-15 December 2004, Sydney, Australia. pp.224-234, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.319-325, 2005. Pennington, NJ. Electrochemical Society
State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia. pp.150-160, 2004. Pennington, N.J.. Electrochemical Society
Kim, T.H. ; Howlader, M.M.R. ; Itoh, T. ; Suga, T.
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Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.239-247, 2003. Pennington, NJ. Electrochemical Society
Howlader, M.M.R. ; Okada, H. ; Itoh, T. ; Suga, T.
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Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.309-320, 2003. Pennington, NJ. Electrochemical Society
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.41-47, 2001. Pennington, NJ. Electrochemical Society
Takigawa, R. ; Higurashi, E. ; Suga, T. ; Shinada, S. ; Kawanishi, T.
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Optomechatronic Micro/Nano Devices and Components II. pp.637603-637603, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics. pp.297-301, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tsaur, J.-J. ; Wang, Z.J. ; Zhang, L. ; Ichiki, M. ; Maeda, R. ; Suga, T.
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Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.215-224, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
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Micromachining and Microfabrication Process Technology and Devices. pp.379-383, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering