1.

Conference Proceedings
Conference Proceedings
1. Room-Temperature Wafer Bonding Using Ar Beam Surface Activation
Takagi, H. ; Maeda, R. ; Hosoda, N. ; Chung, T.R. ; Suga, T.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.265-274,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-35
2.

Conference Proceedings
Conference Proceedings
2. HIGHLY TEXTURED SUPERCONDUCTING Bi2Sr2CaCu2OY CRYSTALS PREPARED BY UNIDIRECTIONAL SOLIDIFICATION PROCESSING
Shiohara, Y. ; Oyama, T. ; Nakagawa, M. ; Suga, T. ; Ishige, K. ; Izumi, T. ; Nagaya, S. ; Miyajima, M. ; Hirabayashi, I. ; Tanaka, S.
Pub. info.: High-temperature superconductors : fundamental properties and novel materials processing : symposium held November 27-December 2, 1989, Boston, Massachusetts, U.S.A..  pp.305-308,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 169
3.

Conference Proceedings
Conference Proceedings
3. Silicon Wafer Bonding at Room Temperature by Ar Beam Surface Activation in Vacuum
Takagi, H. ; Maeda, R. ; Chung, T.R. ; Suga, T.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.393-400,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
4.

Conference Proceedings
Conference Proceedings
4. Piezoelectric Force Sensing Pb(Zr,Ti)O3 Microcantilever Array for Multiprobe Scanning Force Microscopy
Itoh, T. ; Lee, C. ; Chu, J. ; Suga, T.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.59-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
5.

Conference Proceedings
Conference Proceedings
5. Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM
Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
Pub. info.: Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.35-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 459