1.

Conference Proceedings
Conference Proceedings
1. CALCULATION OF SLIP LENGTH IN 300 mm SILICON WAFERS DURING THERMAL PROCESSES
Akatsuka, M. ; Sueoka, K. ; Katahama, H. ; Adachi, N.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.671-682,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. MORPHOLOGY CHANGE OF OXIDE PRECIPITATES IN CZ SILICON DURING TWO-STEP ANNEALING
Sueoka, K. ; Ikeda, N. ; Yamamoto, T. ; Kobayashi, S.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.732-743,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings
Conference Proceedings
3. EFFECT OF HEAVY BORON DOPING ON OXIDE PRECIPITATE GROWTH IN CZOCHRALSKI SILICON
Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1113-1125,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)